Ref. No. Part No. Part Name Qty Remarks
01 363D965138 Guide 1 E
02 408D965134C Bezel 1 E
03 363D965137A Guide 1 E
04 345C889079A Plate,light shielding 1 E
05 345D889067 Shield,light L 1 BE
06 329D965160B Cam 1 E
07
●
388D889039D Spring,tension 2 BE
08 363D889038E Roller 4 BE
09 401C889070 Chip,detector 1 BE
10 356D965158B Bracket 1 E
11 401D889057C Panel 1 BE
12 340S0015 Handle 1 E
13 408D965136C Case,magazine 1 E
14 322D889061C Support,shaft 1 BE
15 180M302002T Pin 1 E
16 336D889062E Pulley 1 BE
17
●
316S3101 Latch 2 E TAKIGEN
18 338D889054D Ring 4 BE
19 340D965111B Handle 2 E
20 405D889072A Label,safety 1 BE
21 305D889055C Nut,plate 1 BE
22 345D889064C Shield,light C 1 BE
23 319D965114A Shaft 1 E
24 356D889023D Plate,mounting 2 BE
25 363D889024D Plate,guide L 1 BE
26 363D965128D Plate,guide 1 E
27
●
388D1024123 Spring,tension 2 B
28 322D889043C Support,shaft 4 BE
29
●
388D889049C Spring,tension 2 BE
30 329D889042C Cam B 2 BE
31
●
322D889048C Suppport,slede 7 BE
32 356D965129C Bracket 1 E
33 367D889052F Foot 4 BE
34 408D965135D Lid,magazine 1 E
35 405D1024126 Label 1
36 405D1024125 Label 1
37 356D965117 Bracket 1 E
38 405D1020451 Plate,scale 1 E
39 408D965133B Cover,lid 1 E
40 345D965127 Shield,light 1 E
41 329D889041C Cam A 2 BE
42 363D889066A Roller,nip 6 BE
43 319D965116A Shaft 2 E
44 363D889045A Guide 2 BE
45 405D965115B Plate,scale 1 E
46 319D965113B Shaft 1 E
Drawing
Ref. No. Part No. Part Name Qty Remarks
47 334D965159B Roller 10 E
48 363D889025D Plate,guide R 1 BE
49 356D889023D Plate,mounting 2 BE
50 356C965142C Bracket 1 E
51
●
322D889048C Support,shaft 7 BE
52 338D889013C Ring 1 BE
53
●
322SY142 Support,shaft 2 E NMB LF-1910ZZ
54 328D889016 Click 1 BE
55
●
388D889015C Spring,tension 1 BE
56 341D889017C Arm 1 BE
57 363D889066A Roller,nip 6 BE
58 322D889048C Support,shaft 7 BE
59 363D965123A Plate,guide 1 E
60 319D965112A Shaft 1 E
61 180M301602T Pin 1 E
62 363D889066A Roller,nip 6 BE
63 327D889009E Gear,spur 1 BE
64 363D889008C Roller,guide 4 BE
65 363C1020437 Roller 1 E
66 345D965126A Shield,light 1 E
67 350D965124A Cover 1 E
68 363D889032C Roller 1 BE
69 319D889033C Shaft 1 BE
70 320D965131C Shaft,joint 1 E
71
●
388D889020C Spring,tension 1 BE
72 305D889058E Nut,plate 2 BE
73 405D965132B Label 1 E
74 319D889036C Shaft 1 BE
75
●
388D889037C Spring,torsion 1 BE
76 398D965125A Shutter 1 E
77 319D889059H Shaft,release 1 BE
78 345D889068 Shield,light R 1 BE
79 338D889097 Ring 2 E
80 347D889082F Flange 2 E
81 315D889096 Ring 1 BE
82 405D965121B Plate,scale 2 E
83 409C965153A Spool 1 E
84 409D965118 Spool 1 E
85 409C965152A Spool 1 E
86
●
304D889090F Setscrew 1 BE
87 405D965121B Plate,scale 2 E
A01
❍
899C21454B0C-K Paper magazine ass'y 1 E
A01 MAG AG180AC Paper magazine ass'y 1
E
A02
●
409C965155A Spool ass'y 1
110A6737572 PCB,MNC 1
E
03 ★ CALIBRATION MASK (F330) Mask,calibration 1
E
04 ★ UPS BATTERY (F330) UPS
1
E With cable
05 899C21532A1 Disk,system 1
06
●
128C968110 Switch 1
E
07 350D966554B Cover 1
E
08
●
845C897462A Back light section 1
E
09 605D965624C Plate,parallel flat 1
E
10 605D990281 Plate,parallel flat 1
E
11 899C21472A0 Kit,light shielding 1
E For mask 6x9
12 363D1023975 Guide 5
E
13 ★ N MASK 6X9 (SFA) Negative mask 1
E 6x9E
14 6B2516201 Plate,glass 1
E 6x9
15 357C1025063 Mount 5
16 899C21472A0 Kit,light shielding 1
E For mask 6x8
17 363D1023975 Guide 5
E
18 ★ N MASK 6X8 (SFA) Negative mask 1
E 6x8E
19 6B5606510 Plate,glass 1
E 6x8
20 357C1025063 Mount 5
21 899C21472A0 Kit,light shielding 1
E For mask 6x7
22 363D1023975 Guide 5
E
23 ★ N MASK 6X7 (SFA) Negative mask 1
E 6x7E
24 6B2516211 Plate,glass 1
E 6x7
25 357C1025063 Mount 5
26 899C21471A0 Kit,light shielding 1
E For mask 6x6
27 363D1023975 Guide 5
E
28 ★ N MASK 6X6 (SFA) Negative mask 1
E 6x6E
29 6B2516221 Plate,glass 1
E 6x6
30 357C1025063 Mount 5
31 899C21471A0 Kit,light shielding 1
E For mask 6x4.5
32 363D1023975 Guide 5
E
33 ★ N MASK 6X4.5 (SFA) Negative mask 1
E 6x4.5E
34 6B2516231 Plate,glass 1
E 6x4.5
35 357C1025063 Mount 5
899C21485A0 Kit,light shielding 1
E For mask 240
37 ★ N MASK IX240 (SFA) Negative mask 1
E 240
38 12A6800890 Case,magnet 11
E
39 899C21469A0 Kit,light shielding 1
E For mask 135
40 ★ N MASK 135F (SFA) Negative mask 1
E 135F
41 12A6800890 Case,magnet 11
E
42 899C21469A0 Kit,light shielding 1
E For mask 135
43 ★ N MASK 135H (SFA) Negative mask 1
E 135H
44 12A6800890 Case,magnet 11
E
45 899C21470A0 Kit,light shielding 1
E For mask 110
46 ★ N MASK 110 (SFA) Negative mask 1
E 110
47 12A6800890 Case,magnet 11
E
48 899C21486A0 Kit,light shielding 1
E For mask 126
49 ★ N MASK 126 (SFA) Negative mask 1
E 126
50 12A6800890 Case,magnet 11
E
51 899C21469A0 Kit,light shielding 1
E For mask 135
52 ★ N MASK PA/MANUAL (SFA) Negative mask 1
E 135P
53 12A6800890 Case,magnet 11
E
54 402C1023977 Bellows 1
E 135RVM
55 12A6800890 Case,magnet 11
E
A01 ★ NC MASK 135H (F330) Negative mask 1
E 135H
A02 ★ LIGHT BOX (F330) Light box 1
E
A03 ★ DF-BOX120 (F330) Box,mirror 1
E For 120
A04 ★ N MASK 6X9 (F330/340) 1
E 6x9
A05 ★ N MASK 6X8 (F330/340) 1
E 6x8
A06 ★ N MASK 6X7 (F330/340) 1
E 6x7
A07 ★ N MASK 6X6 (F330/340) 1
E 6x6
A08 ★ N MASK 6X4.5 (F330/340) 1
E 6x4.5
A09 ★ N/P MASK IX240 (F330) 1
E
240
A10 ★ N MASK 135F (F330)
Mask,film
1
E
135F
A11 ★ N MASK 135H (F330) 1
E 135H
A12 ★ N MASK 110 (F330) 1
E 110
A13 ★ N MASK 126 (F330) 1
E 126
A14 ★ N MASK 135P (F330) 1
E 135P
A15 ★ SMASK 135MOUNTEDSLID
1
369D966776B Duct 1 E
02 356D1024582 Bracket 1
03 338D1024585 Ring 2
04 119C1024583A Fan F406 1 SANYO
109BF24HA2
05 372D966884 Fitting,tube 1 E
06 356D967013B Bracket 1 E
07 375D966631B Partitioner 1 E
08
●
144C966112C Electrode FS415 1 E KEIHIN
HL-F-001F
09 317D966951C Cap 1 E
10 359D1024064B Tank 1
11 357D966950B Mount 1 E
12 375D966651C Partitioner 1 E
13
●
376C1024520B Filter 3 ROKITEKUNO
14 359C1024505D Tank 1
15 356D966832B Bracket 1 E
16 318S3006 Grommet 1 BE TAKIGEN
C-30-BW-10-2
17 11A5905660 Ball,floating 2 E
18 359D1024853B Tank 1
19 357D966829E Mount 1 E
20 317D966976 Cap 1 E
21 370D966953B Hose 1 E(POLIBIN)
22 360F0673D Case 1 BE MITANI
23 374H0015A Valve 1 BE FUJI
24 356D1024524A Bracket 1
25
●
133C1024528A Pump,circulation 4 IWAKI MR-6-L07
PU406
26
●
133C1024528A Pump,circulation 4 IWAKI MR-6-L07
PU405
27
●
133C1024528A Pump,circulation 4 IWAKI MR-6-L07
PU404
28
●
133C1024528A Pump,circulation 4 IWAKI MR-6-L07
PU403
29
●
133C966785A Pump,circulation 2 IWAKI
PU402 MD-10K-NL38
Drawing
Ref. No. Part No. Part Name Qty Remarks
30
●
133C966785A Pump,circulation 2 IWAKI
PU401 MD-10K-NL38
31 70B7505493 Valve,drain 6 BCDE
32 375D967001A Tray 1 E
33
●
115C966638A Thermostat 4 E NIHON GT
D401 － D404 03EP-15A06B-C
34
●
117C1024530C Heater H403 1 HIRANO 3 Pipes
200V 250W,
240V 360W
35
●
117C966636 Heater 3 E TOURITSU FPIP
H401,H402,H404
200V 250W,
240V 360W
36 305D1024586 Nut 6
37 317D808464 Stopper 1 E MAGOME
38 364F0109A Guard 3 BE
39 119C966640B Fan F401,F402 2 E SANYO
109R1224H134
40 356D966603C Bracket 2 E
41 316S1119 Clamp,cord 17 E KITAGAWQ
CKS-20-L
42 375G03701 O-ring 4 E OHTOMO
43 372D966617A Nozzle 4 E
44
●
114C966111B Electrode 2 E KEIHIN
FS401,FS402 FLS-100S
45
●
115C966114 Thermistor 4 E FOHYU
TS401 － TS404 YT205-S6
46 350D1024587 Cover 2
47 341G03105A Knob 3 CDE
48 ※ 376G03101A Filter 3 BCDE
49
●
144C1024525C Electrode FS421 1 MITSUBISHI LS001
50 317D1024521 Stopper 3
51 120S2271 Connector 1
52 41B7501983 Holder 1 CD
53
●
128C1024527 Switch 1 KEIHIN HL-3-001D
A01
●
128C1024526 Float switch ass'y 4
FS403 － FS40
363C1024778C Blade ass'y 3
02
●
375D1024782B Packing 3
03
●
375D1024544C Seal 3
Drawing
Ref. No. Part No. Part Name Qty Remarks
A01
●
345C1024531 Partitioner ass'y 1 PS1,2
A02
●
345C1024532 Partitioner ass'y 1 PS2,3
A03
●
345C1024533 Partitioner ass'y 1 PS3,4
